Patent · US Active

Method for polymer-assisted chip transfer

US10586725B1 · kind B1 · utility

2Cited by
37References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 10, 2018
Grant dateMar 10, 2020
Priority date
Expiry dateMar 8, 2038

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10H20/825
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

One or more chips are transferred from one substrate to another by using one or more polymer layers to secure the one or more chips to an intermediate carrier substrate. While secured to the intermediate carrier substrate, the one or more chips may be transported or put through further processing or fabrication steps. To release the one or more chips, the adhesion strength of the one or more polymer layers is gradually reduced to minimize potential damage to the one or more chips.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.