Method for polymer-assisted chip transfer
US10586725B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 10, 2018 |
| Grant date | Mar 10, 2020 |
| Priority date | — |
| Expiry date | Mar 8, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/825
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
One or more chips are transferred from one substrate to another by using one or more polymer layers to secure the one or more chips to an intermediate carrier substrate. While secured to the intermediate carrier substrate, the one or more chips may be transported or put through further processing or fabrication steps. To release the one or more chips, the adhesion strength of the one or more polymer layers is gradually reduced to minimize potential damage to the one or more chips.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.