Patent · US Active

Facet mirror

US10599041B2 · kind B2 · utility

1Cited by

6References

24Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Stig Bieling · Aalen, DE
Markus Deguenther · Aalen, DE
Johannes Wangler · Oberkochen, DE

Key dates

Filing date	Oct 31, 2014
Grant date	Mar 24, 2020
Priority date	—
Expiry date	May 10, 2037

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70575
WIPO fieldOptics
WIPO sectorInstruments

Abstract

Illumination optical unit for illuminating an object field in a projection exposure apparatus, comprising a first facet mirror with a structure, which has a spatial frequency of at least 0.2 mm−1 in at least one direction, and a second facet mirror, comprising a multiplicity of facets, wherein the facets are respectively provided with a mechanism for damping spatial frequencies of the structure of the first facet mirror.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.