Patent · US Active

Method for correcting the distortion of a first imaging optical unit of a first measurement system

US10599936B2 · kind B2 · utility

0Cited by

3References

20Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Dirk Seidel · Jena, DE
Carsten Schmidt · Jena, DE
Michael Himmelhaus · Karlsruhe, DE

Key dates

Filing date	Jul 20, 2018
Grant date	Mar 24, 2020
Priority date	—
Expiry date	Sep 12, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG06V10/98
WIPO fieldComputer technology
WIPO sectorElectrical engineering

Abstract

A method for correcting the distortion of a first imaging optical unit of a first measurement system is provided, wherein the first imaging optical unit has a first measurement accuracy and the method comprises the steps of:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.