Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace
US10605530B2 · kind B2 · utility
2Cited by
1,240References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 26, 2017 |
| Grant date | Mar 31, 2020 |
| Priority date | — |
| Expiry date | Aug 12, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67248
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
An assembly of a liner and a flange for a vertical furnace for processing substrates is provided. The liner being configured to extend in the interior of a process tube of the vertical furnace, and the flange is configured to at least partially close a liner opening. The liner comprising a substantially cylindrical wall delimited by the liner opening at a lower end and closed at a higher end and being substantially closed for gases above the liner opening and defining an inner space. The flange comprising:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.