Inventor · Nieuw-Vennep, NL

Lucian Jdira

20Patents
5h-index
38Co-inventors
65Inventor score

Filing activity: Jan 21, 2011 → Jul 5, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US10103040B1 Apparatus and method for manufacturing a semiconductor device Electricity 450 Active
US8398773B2 Thermal processing furnace and liner for the same Electricity 448 Active
US9153466B2 Wafer boat Electricity 7 Active
US10683571B2 Gas supply manifold and method of supplying gases to chamber using same Electricity 6 Active
US10954597B2 Atomic layer deposition apparatus Electricity 5 Active
US10900122B2 Apparatus for semiconductor wafer processing Chemistry; Metallurgy 5 Active
US10844484B2 Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods Electricity 5 Active
US11230766B2 Substrate processing apparatus and method Electricity 3 Active
US10605530B2 Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace Electricity 2 Active
US10343907B2 Method and system for delivering hydrogen peroxide to a semiconductor processing chamber Electricity 2 Active
US11891696B2 Injector configured for arrangement within a reaction chamber of a substrate processing apparatus Electricity 0 Active
US12243757B2 Flange and apparatus for processing substrates Mechanical Engineering; Lighting; Heating 0 Active
US12195852B2 Substrate processing apparatus with an injector Electricity 0 Active
US11830730B2 Layer forming method and apparatus Electricity 0 Active
US11971217B2 Batch furnace assembly and method of operating a batch furnace assembly Mechanical Engineering; Lighting; Heating 0 Active
US12366410B2 Apparatus for processing a plurality of substrates provided with an extractor chamber Mechanical Engineering; Lighting; Heating 0 Active
US10858738B2 Wafer boat cooldown device Electricity 0 Active
US9431238B2 Reactive curing process for semiconductor substrates Electricity 0 Active
US12412759B2 Substrate processing apparatus, reactor mover for moving a reactor of the apparatus and method of maintaining the reactor of the apparatus Electricity 0 Active
US12077854B2 Chemical vapor deposition furnace with a cleaning gas system to provide a cleaning gas Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.