Substrate edge detection
US10607873B2 · kind B2 · utility
1Cited by
13References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 23, 2017 |
| Grant date | Mar 31, 2020 |
| Priority date | — |
| Expiry date | Mar 23, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67259
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method including directing, by an optical system, an illumination beam to a surface of a substrate, providing relative motion between the directed illumination beam and the substrate until the directed illumination beam is illuminated on a grating underneath an edge or a notch of the substrate, diffracting, by the grating, at least a portion of the illumination beam, and detecting, by the detector, the diffracted illumination.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.