Patent · US Active

Temperature-controlled flange and reactor system including same

US10612136B2 · kind B2 · utility

3Cited by

1,495References

21Claims

0Family size

Assignee

ASM IP Holding B.V. · NL

Inventors

Sonti Sreeram · Gilbert, US
John Tolle · Gilbert, US
Joe Margetis · Gilbert, US
Junwei Su · Tempe, US

Key dates

Filing date	Jun 29, 2018
Grant date	Apr 7, 2020
Priority date	—
Expiry date	Jun 29, 2038

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C16/4411
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A flange, flange assembly, and reactor system including the flange and flange assembly are disclosed. An exemplary flange assembly includes heated and cooled sections to independently control temperatures of sections of the flange. Methods of using the flange, flange assembly and reactor system are also disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.