Patent · US Active

Method for operating a plurality of FIB-SEM systems

US10615002B2 · kind B2 · utility

0Cited by

1References

8Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Josef Biberger · Rottenburg a. d. Laaber, DE
Ralph Pulwey · Aalen, DE

Key dates

Filing date	Jul 18, 2019
Grant date	Apr 7, 2020
Priority date	—
Expiry date	Jul 18, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/31749
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Processes may be performed with a plurality of FIB-SEM systems. A first process group includes recording an image with the electron beam column, depositing material with supply of a process gas, and performing ion beam etching. A second process group includes performing a sample exchange, exchanging a reservoir of a gas source for the process gas, and verifying an image that was recorded with the electron beam column. The processes of the second group are prioritized. The FIB-SEM systems are actuated to work through processes contained in process lists. If in a plurality of FIB-SEM systems processes of the second group are to be performed simultaneously, an instruction based on the prioritization is output to the user.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.