Temperature sensor based on ratio of clock signals from respective MEMS resonators
US10622973B1 · kind B1 · utility
2Cited by
15References
20Claims
0Family size
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Key dates
| Filing date | Mar 4, 2019 |
| Grant date | Apr 14, 2020 |
| Priority date | — |
| Expiry date | Mar 4, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03L7/1976
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
In a high resolution temperature sensor, first and second MEMS resonators generate respective first and second clock signals and a locked-loop reference clock generator generates a reference clock signal having a frequency that is phase-locked to at least one of the first and second clock signals. A frequency-ratio engine within the MEMS temperature sensor oversamples at least one of the first and second clock signals with the reference clock signal to generate a ratio of the frequencies of the first and second clock signals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.