Statistical hierarchical reconstruction from metrology data
US10627213B2 · kind B2 · utility
1Cited by
5References
20Claims
0Family size
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Key dates
| Filing date | Nov 30, 2016 |
| Grant date | Apr 21, 2020 |
| Priority date | — |
| Expiry date | Nov 30, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70625
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method including obtaining measurement results of a device manufacturing process or a product thereof, obtaining sets of one or more values of one or more parameters of a distribution by fitting the distribution against the measurement results, respectively, and obtaining, using a computer, a set of one or more values of one or more hyperparameters of a hyperdistribution by fitting the hyperdistribution against the sets of values of the parameters.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.