Remco Dirks
9Patents
2h-index
15Co-inventors
44Inventor score
Filing activity: Oct 15, 2010 → Mar 2, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8706455B2 | Methods and apparatus for calculating electromagnetic scattering properties of a structure using a normal-vector field and for reconstruction of approximate structures | Physics | 3 | Active |
| US8645109B2 | Methods and apparatus for determining electromagnetic scattering properties and structural parameters of periodic structures | Physics | 2 | Active |
| US10592618B2 | Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method | Electricity | 1 | Active |
| US10627213B2 | Statistical hierarchical reconstruction from metrology data | Physics | 1 | Active |
| US11392043B2 | Method and metrology apparatus for determining estimated scattered radiation intensity | Physics | 0 | Active |
| US10151985B2 | Process flagging and cluster detection without requiring reconstruction | Physics | 0 | Active |
| US11994806B2 | Metrology method and apparatus, computer program and lithographic system | Physics | 0 | Active |
| US11556060B2 | Method of calibrating a plurality of metrology apparatuses, method of determining a parameter of interest, and metrology apparatus | Physics | 0 | Active |
| US11429763B2 | Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.