Inventor · Deurne, NL

Remco Dirks

9Patents
2h-index
15Co-inventors
44Inventor score

Filing activity: Oct 15, 2010 → Mar 2, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US8706455B2 Methods and apparatus for calculating electromagnetic scattering properties of a structure using a normal-vector field and for reconstruction of approximate structures Physics 3 Active
US8645109B2 Methods and apparatus for determining electromagnetic scattering properties and structural parameters of periodic structures Physics 2 Active
US10592618B2 Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method Electricity 1 Active
US10627213B2 Statistical hierarchical reconstruction from metrology data Physics 1 Active
US11392043B2 Method and metrology apparatus for determining estimated scattered radiation intensity Physics 0 Active
US10151985B2 Process flagging and cluster detection without requiring reconstruction Physics 0 Active
US11994806B2 Metrology method and apparatus, computer program and lithographic system Physics 0 Active
US11556060B2 Method of calibrating a plurality of metrology apparatuses, method of determining a parameter of interest, and metrology apparatus Physics 0 Active
US11429763B2 Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.