Methods for depositing coatings on aerospace components

US10633740B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Yuriy Melnik · San Jose, US
• Sukti Chatterjee · San Jose, US
• Kaushal Gangakhedkar · San Jose, US
• Jonathan Frankel · Los Gatos, US
• Lance A. Scudder · Sunnyvale, US
• Pravin K. Narwankar · Sunnyvale, US
• David Alexander BRITZ · Los Gatos, US
• Thomas Knisley · Monroe, US
• Mark Saly · Santa Clara, US
• David Thompson · San Jose, US

Key dates

• Filing date: Mar 18, 2019
• Grant date: Apr 28, 2020
• Expiry date: Mar 18, 2039

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F23R2900/00018
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Protective coatings on an aerospace component and methods for depositing the protective coatings are provided. A method for depositing a coating on an aerospace component includes exposing an aerospace component to a first precursor and a first reactant to form a first deposited layer on a surface of the aerospace component by a chemical vapor deposition (CVD) process or a first atomic layer deposition (ALD) process and exposing the aerospace component to a second precursor and a second reactant to form a second deposited layer on the first deposited layer by a second ALD process, where the first deposited layer and the second deposited layer have different compositions from each other.