Polarizers and polarization splitters phase-matched with a back-end-of-line layer
US10641956B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 4, 2019 |
| Grant date | May 5, 2020 |
| Priority date | — |
| Expiry date | Mar 4, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/121
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Structures including a waveguide core and methods of fabricating a structure including a waveguide core. A back-end-of-line interconnect structure has an interlayer dielectric layer and a cap layer stacked over the interlayer dielectric layer. A waveguide core includes a section arranged beneath the cap layer. The waveguide core has a first index of refraction that varies as a function of width, and the cap layer has a second index of refraction. The section of the waveguide core has a width that is selected such that the first index of refraction is substantially equal to the second index of refraction to provide phase matching effective for coupling a portion of an optical signal from the waveguide core to the cap layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.