Dense arrays and charge storage devices
US10644021B2 · kind B2 · utility
2Cited by
220References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 4, 2018 |
| Grant date | May 5, 2020 |
| Priority date | — |
| Expiry date | May 4, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/00
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
There is provided a monolithic three dimensional array of charge storage devices which includes a plurality of device levels, wherein at least one surface between two successive device levels is planarized by chemical mechanical polishing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.