Generating high resolution images from low resolution images for semiconductor applications
US10648924B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 2, 2017 |
| Grant date | May 12, 2020 |
| Priority date | — |
| Expiry date | Aug 28, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06V2201/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods and systems for generating a high resolution image for a specimen from one or more low resolution images of the specimen are provided. One system includes one or more computer subsystems configured for acquiring one or more low resolution images of a specimen. The system also includes one or more components executed by the one or more computer subsystems. The one or more components include a model that includes one or more first layers configured for generating a representation of the one or more low resolution images. The model also includes one or more second layers configured for generating a high resolution image of the specimen from the representation of the one or more low resolution images.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.