Inventor · Santa Cruz, CA, US

Keith Wells

16Patents
8h-index
31Co-inventors
72Inventor score

Filing activity: Jul 19, 1993 → Nov 23, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US5864394A Surface inspection system Electricity 187 Expired
US6081325A Optical scanning system for surface inspection Physics 166 Expired
US5355212A Process for inspecting patterned wafers Physics 114 Expired
US5604585A Particle detection system employing a subsystem for collecting scattered light from the particles Physics 62 Expired
US5530550A Optical wafer positioning system Physics 42 Expired
US9915625B2 Optical die to database inspection Physics 19 Active
US6888627B2 Optical scanning system for surface inspection Physics 18 Expired
US6922236B2 Systems and methods for simultaneous or sequential multi-perspective specimen defect inspection Physics 15 Expired
US7477372B2 Optical scanning system for surface inspection Physics 5 Active
US11263737B2 Defect classification and source analysis for semiconductor equipment Electricity 4 Active
US10648924B2 Generating high resolution images from low resolution images for semiconductor applications Physics 3 Active
US7075637B2 Optical scanning system for surface inspection Physics 3 Expired
US9816940B2 Wafer inspection with focus volumetric method Physics 1 Active
US10012599B2 Optical die to database inspection Physics 1 Active
US11984330B2 Atomic layer etch and deposition processing systems including a lens circuit with a tele-centric lens, an optical beam folding assembly, or a polygon scanner Electricity 0 Active
US12394655B2 Subsurface alignment metrology system for packaging applications Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.