Method and apparatus for pulse gas delivery with isolation valves
US10649471B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 2, 2018 |
| Grant date | May 12, 2020 |
| Priority date | — |
| Expiry date | Feb 2, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/363
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A fluid control system for pulse delivery of a fluid include a flow channel, an isolation valve to initiate and terminate a pulse of fluid from the flow channel, and a pulse mass flow controller (MFC). The MFC includes a control valve to control flow of fluid in the flow channel, a flow sensor to measure flow rate in the flow channel, and a controller to control flow of fluid through the control valve and switching of the isolation valve, to control a mass of fluid delivered during the pulse of fluid. Controlling the flow of fluid through the control valve can be based on feedback from the flow sensor during the pulse initiated and terminated by the isolation valve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.