Auto-calibration to a station of a process module that spins a wafer
US10651065B2 · kind B2 · utility
3Cited by
2References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 5, 2018 |
| Grant date | May 12, 2020 |
| Priority date | — |
| Expiry date | Jun 30, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6831
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method for calibration including determining a temperature induced offset in a pedestal of a process module under a temperature condition for a process. The method includes delivering a wafer to the pedestal of the process module by a robot, and detecting an entry offset. The method includes rotating the wafer over the pedestal by an angle. The method includes removing the wafer from the pedestal by the robot and measuring an exit offset. The method includes determining a magnitude and direction of the temperature induced offset using the entry offset and exit offset.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.