Peter Thaulad
13Patents
4h-index
26Co-inventors
56Inventor score
Filing activity: Apr 13, 2006 → Dec 16, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7211979B2 | Torque-position transformer for task control of position controlled robots | Physics | 1,161 | Expired |
| US7405531B2 | Torque-position transformer for task control of position controlled robots | Physics | 38 | Active |
| US9831110B2 | Vision-based wafer notch position measurement | Emerging Cross-Sectional Technologies | 10 | Active |
| US7811153B1 | High throughput servo load cup with integrated wet chemistry delivery | Electricity | 6 | Active |
| US10796940B2 | Enhanced automatic wafer centering system and techniques for same | Electricity | 4 | Active |
| US10651065B2 | Auto-calibration to a station of a process module that spins a wafer | Electricity | 3 | Active |
| US11581214B2 | Enhanced automatic wafer centering system and techniques for same | Electricity | 2 | Active |
| US9349629B2 | Touch auto-calibration of process modules | Electricity | 2 | Active |
| US10509052B2 | Smart vibration wafer with optional integration with semiconductor processing tool | Electricity | 1 | Active |
| US11239100B2 | Auto-calibration to a station of a process module that spins a wafer | Electricity | 0 | Active |
| US11742229B2 | Auto-calibration to a station of a process module that spins a wafer | Electricity | 0 | Active |
| US12341040B2 | Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health check | Electricity | 0 | Active |
| US12168301B2 | Fixture for automatic calibration of substrate transfer robot | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.