Inventor · Santa Clara, CA, US

Peter Thaulad

13Patents
4h-index
26Co-inventors
56Inventor score

Filing activity: Apr 13, 2006 → Dec 16, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US7211979B2 Torque-position transformer for task control of position controlled robots Physics 1,161 Expired
US7405531B2 Torque-position transformer for task control of position controlled robots Physics 38 Active
US9831110B2 Vision-based wafer notch position measurement Emerging Cross-Sectional Technologies 10 Active
US7811153B1 High throughput servo load cup with integrated wet chemistry delivery Electricity 6 Active
US10796940B2 Enhanced automatic wafer centering system and techniques for same Electricity 4 Active
US10651065B2 Auto-calibration to a station of a process module that spins a wafer Electricity 3 Active
US11581214B2 Enhanced automatic wafer centering system and techniques for same Electricity 2 Active
US9349629B2 Touch auto-calibration of process modules Electricity 2 Active
US10509052B2 Smart vibration wafer with optional integration with semiconductor processing tool Electricity 1 Active
US11239100B2 Auto-calibration to a station of a process module that spins a wafer Electricity 0 Active
US11742229B2 Auto-calibration to a station of a process module that spins a wafer Electricity 0 Active
US12341040B2 Integrated adaptive positioning systems and routines for automated wafer-handling robot teach and health check Electricity 0 Active
US12168301B2 Fixture for automatic calibration of substrate transfer robot Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.