Using identifiers to map edge ring part numbers onto slot numbers
US10651097B2 · kind B2 · utility
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21Claims
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Assignee
Inventors
Key dates
| Filing date | Aug 30, 2018 |
| Grant date | May 12, 2020 |
| Priority date | — |
| Expiry date | Sep 11, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/30
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Methods and systems for tracking an edge ring includes capturing an edge ring identifier from a source related to the edge ring. The edge ring is inserted into a slot of an edge ring carrier, wherein the edge ring is being assigned to the edge ring carrier. The edge ring identifier is tracked to determine transfers into and out of the edge ring carrier and into and out of a processing station. The tracking of the edge ring identifier builds a metadata file that provides lifetime information regarding the edge ring.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.