Robert O'Donnell
40Patents
15h-index
18Co-inventors
78Inventor score
Filing activity: Dec 30, 1977 → Aug 30, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8318327B2 | Low contamination components for semiconductor processing apparatus and methods for making components | Emerging Cross-Sectional Technologies | 346 | Active |
| US6537429B2 | Diamond coatings on reactor wall and method of manufacturing thereof | Emerging Cross-Sectional Technologies | 58 | Expired |
| US6830622B2 | Cerium oxide containing ceramic components and coatings in semiconductor processing equipment and methods of manufacture thereof | Emerging Cross-Sectional Technologies | 49 | Expired |
| US7300537B2 | Productivity enhancing thermal sprayed yttria-containing coating for plasma reactor | Electricity | 46 | Expired |
| US6954993B1 | Concentric proximity processing head | Electricity | 35 | Expired |
| US6988326B2 | Phobic barrier meniscus separation and containment | Electricity | 33 | Expired |
| US6613442B2 | Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereof | Chemistry; Metallurgy | 32 | Expired |
| US7311797B2 | Productivity enhancing thermal sprayed yttria-containing coating for plasma reactor | Electricity | 31 | Expired |
| US6780787B2 | Low contamination components for semiconductor processing apparatus and methods for making components | Emerging Cross-Sectional Technologies | 31 | Expired |
| US6533910B2 | Carbonitride coated component of semiconductor processing equipment and method of manufacturing thereof | Performing Operations; Transporting | 30 | Expired |
| US6620520B2 | Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof | Emerging Cross-Sectional Technologies | 30 | Expired |
| US5994235A | Methods for etching an aluminum-containing layer | Emerging Cross-Sectional Technologies | 28 | Expired |
| US7093375B2 | Apparatus and method for utilizing a meniscus in substrate processing | Emerging Cross-Sectional Technologies | 21 | Expired |
| US7255898B2 | Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof | Emerging Cross-Sectional Technologies | 19 | Expired |
| US6773751B2 | Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereof | Chemistry; Metallurgy | 15 | Expired |
| US7363727B2 | Method for utilizing a meniscus in substrate processing | Emerging Cross-Sectional Technologies | 11 | Active |
| US4170839A | Child's toy in the form of a miniature storm sewer system | Human Necessities | 8 | Expired |
| US6852636B1 | Insitu post etch process to remove remaining photoresist and residual sidewall passivation | Electricity | 6 | Expired |
| US7503977B1 | Solidifying layer for wafer cleaning | Electricity | 6 | Expired |
| US6475298B1 | Post-metal etch treatment to prevent corrosion | Chemistry; Metallurgy | 6 | Expired |
| US7605086B2 | Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof | Electricity | 5 | Active |
| US6069035A | Techniques for etching a transition metal-containing layer | Electricity | 5 | Expired |
| US6790242B2 | Fullerene coated component of semiconductor processing equipment and method of manufacturing thereof | Emerging Cross-Sectional Technologies | 4 | Expired |
| US7946303B2 | Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscus | Emerging Cross-Sectional Technologies | 2 | Active |
| US6242107A | Methods for etching an aluminum-containing layer | Emerging Cross-Sectional Technologies | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.