Patent · US Active

Method for controlling a particle beam device and particle beam device for carrying out the method

US10658152B1 · kind B1 · utility

5Cited by

0References

15Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Christian Hendrich · Aalen, DE
Josef Biberger · Rottenburg a. d. Laaber, DE

Key dates

Filing date	Oct 4, 2018
Grant date	May 19, 2020
Priority date	—
Expiry date	Oct 4, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/302
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A method for controlling a particle beam device for imaging, analyzing and/or processing an object, and a particle beam device for carrying out the method. The particle beam device may be an electron beam device and/or or an ion beam device. The method may include identifying at least one control parameter of a unit of the particle beam device using an eye tracker by tracking at least one eye of a user of the particle beam device, and changing the at least one control parameter of the unit of the particle beam device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.