Patent · US Active

Apparatus and method for controlling ion beam properties using electrostatic filter

US10665415B1 · kind B1 · utility

2Cited by

3References

19Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Alexandre Likhanskii · Malden, US
Frank Sinclair · Quincy, US
Shengwu Chang · Hamilton, US

Key dates

Filing date	Nov 6, 2018
Grant date	May 26, 2020
Priority date	—
Expiry date	Nov 6, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/30477
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An apparatus and method are provided. In one embodiment. an apparatus may include a main chamber, where the main chamber includes an electrode assembly. The electrode assembly may include a plurality of electrodes arranged between a chamber entrance and a chamber exit of the main chamber. The apparatus may include a beam tunnel, connected to the chamber entrance, configured to conduct an ion beam to the main chamber; and an electrostatic tuner, disposed in the beam tunnel, the electrostatic tuner comprising at least one tuner electrode, independently coupled to a tuner voltage assembly.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.