Inventor · Malden, MA, US

Alexandre Likhanskii

44Patents
4h-index
43Co-inventors
59Inventor score

Filing activity: Jan 3, 2007 → Mar 3, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US7744039B2 Systems and methods for controlling flows with electrical pulses Emerging Cross-Sectional Technologies 13 Active
US9685298B1 Apparatus and method for contamination control in ion beam apparatus Electricity 6 Active
US9230773B1 Ion beam uniformity control Electricity 5 Active
US9478399B2 Multi-aperture extraction system for angled ion beam Electricity 5 Active
US9761410B2 Apparatus and method for in-situ cleaning in ion beam apparatus Electricity 4 Active
US10192727B2 Electrodynamic mass analysis Electricity 4 Active
US10224181B2 Radio frequency extraction system for charge neutralized ion beam Electricity 3 Active
US10068758B2 Ion mass separation using RF extraction Electricity 3 Active
US10665433B2 Extreme edge uniformity control Electricity 3 Active
US9721750B2 Controlling contamination particle trajectory from a beam-line electrostatic element Electricity 3 Active
USD956005S1 Shaped electrode General 3 Active
US10504682B2 Conductive beam optic containing internal heating element Electricity 2 Active
US11127557B1 Ion source with single-slot tubular cathode Electricity 2 Active
US10923306B2 Ion source with biased extraction plate Electricity 2 Active
US10522330B2 In-situ plasma cleaning of process chamber components Electricity 2 Active
US10665415B1 Apparatus and method for controlling ion beam properties using electrostatic filter Electricity 2 Active
US10410844B2 RF clean system for electrostatic elements Electricity 1 Active
US9922795B2 High brightness ion beam extraction using bias electrodes and magnets proximate the extraction aperture Electricity 1 Active
US10714301B1 Conductive beam optics for reducing particles in ion implanter Electricity 1 Active
US10763072B1 Apparatus, system and techniques for mass analyzed ion beam Electricity 1 Active
US12154753B2 Device to control uniformity of extracted ion beam Electricity 0 Active
US10886098B2 Electrostatic filter and ion implanter having asymmetric electrostatic configuration Electricity 0 Active
US9613777B2 Uniformity control using adjustable internal antennas Electricity 0 Active
US11011343B2 High-current ion implanter and method for controlling ion beam using high-current ion implanter Electricity 0 Active
US10937624B2 Apparatus and method for controlling ion beam using electrostatic filter Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.