Patent · US Active

Method for processing a semiconductor device and semiconductor device

US10665687B2 · kind B2 · utility

0Cited by
9References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 22, 2017
Grant dateMay 26, 2020
Priority date
Expiry dateApr 9, 2038

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/28537
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A method for processing a semiconductor device in accordance with various embodiments may include: depositing a first metallization material over a semiconductor body; performing a heating process so as to form at least one region in the semiconductor body including a eutectic of the first metallization material and material of the semiconductor body; and depositing a second metallization material over the semiconductor body so as to contact the semiconductor body via the at least one region in the semiconductor body.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.