Patent · US Active

High-electron-mobility transistor with buried interconnect

US10665711B2 · kind B2 · utility

0Cited by
22References
20Claims
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Assignee

Inventors

Key dates

Filing dateJun 24, 2019
Grant dateMay 26, 2020
Priority date
Expiry dateJun 24, 2039

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/258
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A high-electron-mobility transistor (HEMT) includes a substrate layer of silicon, a first contact disposed on a first surface of the substrate layer, and a number of layers disposed on a second surface of the substrate layer opposite the first surface. A second contact and a gate contact are disposed on those layers. A trench containing conducting material extends completely through the layers and into the substrate layer. In an embodiment of the HEMT, the first contact is a drain contact and the second contact is a source contact. In another embodiment of the HEMT, the first contact is a source contact and the second contact is a drain contact.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.