Composite waveguiding structures including semiconductor fins
US10670804B1 · kind B1 · utility
5Cited by
2References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 28, 2018 |
| Grant date | Jun 2, 2020 |
| Priority date | — |
| Expiry date | Dec 28, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12097
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Waveguiding structures and methods of fabricating a waveguiding structure. The waveguiding structure includes a waveguide and an array of semiconductor fins that are arranged at least in part inside the waveguide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.