Light guide, detector having light guide, and charged particle beam device
US10679821B1 · kind B1 · utility
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10References
9Claims
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Key dates
| Filing date | Jan 24, 2020 |
| Grant date | Jun 9, 2020 |
| Priority date | — |
| Expiry date | Jan 24, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2445
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged particle beam device includes a scintillator and
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.