Substrate support assembly with deposited surface features
US10679885B2 · kind B2 · utility
4Cited by
54References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 13, 2018 |
| Grant date | Jun 9, 2020 |
| Priority date | — |
| Expiry date | Jun 13, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N13/00
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An electrostatic chuck comprises a ceramic body comprising an embedded electrode and a first ceramic coating on a surface of the ceramic body, wherein the first ceramic coating fills pores in the ceramic body. The electrostatic chuck further comprises a second ceramic coating on the first ceramic coating and a plurality of elliptical mesas on the second ceramic coating, the plurality of elliptical mesas having rounded edges.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.