Zhenwen Ding
8Patents
3h-index
15Co-inventors
50Inventor score
Filing activity: Dec 5, 2011 → Apr 25, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10861693B2 | Cleaning method | Electricity | 11 | Active |
| US10020218B2 | Substrate support assembly with deposited surface features | Electricity | 10 | Active |
| US10679885B2 | Substrate support assembly with deposited surface features | Electricity | 4 | Active |
| US11769683B2 | Chamber component with protective ceramic coating containing yttrium, aluminum and oxygen | Electricity | 1 | Active |
| US8663563B2 | Reflective diffractometric hydrogel sensor for biological and chemical detection | Performing Operations; Transporting | 1 | Active |
| US11114327B2 | ESC substrate support with chucking force control | Electricity | 1 | Active |
| US9805914B2 | Methods for removing contamination from surfaces in substrate processing systems | Electricity | 0 | Active |
| US11476146B2 | Substrate support assembly with deposited surface features | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.