Methods and apparatus for multiple channel mass flow and ratio control systems
US10698426B2 · kind B2 · utility
2Cited by
12References
26Claims
0Family size
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Key dates
| Filing date | May 7, 2018 |
| Grant date | Jun 30, 2020 |
| Priority date | — |
| Expiry date | Sep 4, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F5/005
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
Fluid control systems, including mass flow control systems, mass flow ratio control systems, and mass flow and ratio control systems, as well as corresponding methods for fluid control are provided. These systems allow one shared pressure sensor to be used for multiple flow channels, and a controller which can accurately determine mass flow on the basis of fluid pressure detected by this shared pressure sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.