Patent · US Active

Discriminative imaging technique in scanning transmission charged particle microscopy

US10699872B2 · kind B2 · utility

0Cited by
3References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 28, 2019
Grant dateJun 30, 2020
Priority date—
Expiry dateFeb 28, 2039

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2237/2802
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method of imaging a specimen in a Scanning Transmission Charged Particle Microscope, comprising the following steps:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.