Methods and systems for inhibiting bonding materials from contaminating a semiconductor processing tool
US10700038B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 25, 2017 |
| Grant date | Jun 30, 2020 |
| Priority date | — |
| Expiry date | Jan 2, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/83801
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Methods and systems for inhibiting bonding materials from entering a vacuum system of a semiconductor processing tool are disclosed herein. A semiconductor processing tool configured in accordance with a particular embodiment includes a bondhead having a first port, a second port, a first channel fluidly coupled to the first port, and a second channel fluidly coupled to the second port. The first port and first channel together comprise a first opening extending through the bondhead, and the second port and second channel together comprise a second opening extending through the bondhead. The second opening at least partially surrounds the first opening. A first flow unit is coupled to the first port and is configured to withdraw air from the first opening. A second flow unit is coupled to the second port and is configured to provide fluid to or withdraw fluid from the second opening.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.