Patent · US Active

Long reach vacuum robot with dual wafer pockets

US10710819B1 · kind B1 · utility

7Cited by

1References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Rajkumar Thanu · Santa Clara, US
Damon K. Cox · Round Rock, US

Key dates

Filing date	Jun 19, 2019
Grant date	Jul 14, 2020
Priority date	—
Expiry date	Jun 19, 2039

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB65G2201/0297
WIPO fieldHandling
WIPO sectorMechanical engineering

Abstract

A processing system includes a robot arm with an end effector having a longitudinal axis, the robot arm having a reach of at least 45 inches, wherein the end effector includes: a first wafer pocket defined within the end effector at a first location along the longitudinal axis, wherein the first wafer pocket has the reach of at least 45 inches; and a second wafer pocket defined within the end effector at a second location along the longitudinal axis, wherein the second wafer pocket has a second reach that is less than 45 inches. The end effector is capable of concurrently carrying a first wafer in the first wafer pocket and a second wafer in the second wafer pocket.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.