Inventor · Santa Clara, CA, US

Rajkumar Thanu

15Patents
2h-index
26Co-inventors
46Inventor score

Filing activity: May 10, 2017 → Nov 3, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US10710819B1 Long reach vacuum robot with dual wafer pockets Performing Operations; Transporting 7 Active
US11443973B2 Robot for simultaneous substrate transfer Performing Operations; Transporting 3 Active
US11358809B1 Vacuum robot apparatus for variable pitch access Electricity 2 Active
US11413744B2 Multi-turn drive assembly and systems and methods of use thereof Mechanical Engineering; Lighting; Heating 1 Active
US11850745B2 Multi-turn drive assembly and systems and methods of use thereof Mechanical Engineering; Lighting; Heating 1 Active
US12170220B2 Robot for simultaneous substrate transfer Performing Operations; Transporting 0 Active
US11770049B2 Generating electric power for a robotic end effector Performing Operations; Transporting 0 Active
US11540432B2 Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools Electricity 0 Active
US11883958B2 Robot apparatus including dual end effectors with variable pitch and methods Electricity 0 Active
US10968052B2 Long reach vacuum robot with dual wafer pockets Performing Operations; Transporting 0 Active
US10537997B2 Sensor based auto-calibration wafer Physics 0 Active
US12370672B2 Multi-turn drive assembly and systems and methods of use thereof Mechanical Engineering; Lighting; Heating 0 Active
US11547030B2 Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools Electricity 0 Active
US12004337B2 Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools Electricity 0 Active
US12226896B2 Operations of robot apparatuses within rectangular mainframes Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.