Rajkumar Thanu
15Patents
2h-index
26Co-inventors
46Inventor score
Filing activity: May 10, 2017 → Nov 3, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10710819B1 | Long reach vacuum robot with dual wafer pockets | Performing Operations; Transporting | 7 | Active |
| US11443973B2 | Robot for simultaneous substrate transfer | Performing Operations; Transporting | 3 | Active |
| US11358809B1 | Vacuum robot apparatus for variable pitch access | Electricity | 2 | Active |
| US11413744B2 | Multi-turn drive assembly and systems and methods of use thereof | Mechanical Engineering; Lighting; Heating | 1 | Active |
| US11850745B2 | Multi-turn drive assembly and systems and methods of use thereof | Mechanical Engineering; Lighting; Heating | 1 | Active |
| US12170220B2 | Robot for simultaneous substrate transfer | Performing Operations; Transporting | 0 | Active |
| US11770049B2 | Generating electric power for a robotic end effector | Performing Operations; Transporting | 0 | Active |
| US11540432B2 | Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools | Electricity | 0 | Active |
| US11883958B2 | Robot apparatus including dual end effectors with variable pitch and methods | Electricity | 0 | Active |
| US10968052B2 | Long reach vacuum robot with dual wafer pockets | Performing Operations; Transporting | 0 | Active |
| US10537997B2 | Sensor based auto-calibration wafer | Physics | 0 | Active |
| US12370672B2 | Multi-turn drive assembly and systems and methods of use thereof | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US11547030B2 | Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools | Electricity | 0 | Active |
| US12004337B2 | Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools | Electricity | 0 | Active |
| US12226896B2 | Operations of robot apparatuses within rectangular mainframes | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.