Method for manufacturing a membrane assembly
US10712656B2 · kind B2 · utility
Assignee
Inventors
- Zomer Silvester HOUWELING
- Eric Willem Felix Casimiri
- Tamara Druzhinina
- Paul Janssen
- Michael Alfred Josephus KUIJKEN
- Martinus Hendrikus Antonius Leenders
- Sicco Oosterhoff
- Mária Péter
- Willem Joan Van Der Zande
- Pieter-Jan Van Zwol
- Beatrijs Louise Marie-Joseph Katrien Verbrugge
- Johannes Petrus Martinus Bernardus Vermeulen
- David Ferdinand Vles
- Willem-Pieter Voorthuijzen
Key dates
| Filing date | Aug 26, 2016 |
| Grant date | Jul 14, 2020 |
| Priority date | — |
| Expiry date | Apr 23, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70983
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for manufacturing a membrane assembly for EUV lithography, the method comprising: providing a stack comprising a planar substrate and at least one membrane layer, wherein the planar substrate comprises an inner region and a border region around the inner region; positioning the stack on a support such that the inner region of the planar substrate is exposed; and selectively removing the inner region of the planar substrate using a non-liquid etchant, such that the membrane assembly comprises: a membrane formed from the at least one membrane layer; and a border holding the membrane, the border formed from the border region of the planar substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.