Mária Péter
27Patents
4h-index
69Co-inventors
62Inventor score
Filing activity: Jun 16, 2008 → Jul 11, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9065016B2 | Method for manufacturing a thermoelectric generator | Emerging Cross-Sectional Technologies | 15 | Active |
| US10228615B2 | Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane | Physics | 9 | Active |
| US8895438B2 | Method for forming a multi-level surface on a substrate with areas of different wettability and a semiconductor device having the same | Performing Operations; Transporting | 6 | Active |
| US10698312B2 | Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane | Physics | 6 | Active |
| US10712656B2 | Method for manufacturing a membrane assembly | Physics | 4 | Active |
| US11467486B2 | Graphene pellicle lithographic apparatus | Physics | 2 | Active |
| US11287737B2 | Metal-silicide-nitridation for stress reduction | Physics | 2 | Active |
| US10466585B2 | Pellicle and pellicle assembly | Physics | 2 | Active |
| US8029973B2 | Lithographic method and carrier substrate | Physics | 1 | Active |
| US10908496B2 | Membrane for EUV lithography | Physics | 1 | Active |
| US11947256B2 | Simultaneous double-side coating of multilayer graphene pellicle by local thermal processing | Physics | 1 | Active |
| US11320731B2 | Membrane for EUV lithography | Physics | 1 | Active |
| US11762281B2 | Membrane for EUV lithography | Physics | 0 | Active |
| US11036128B2 | Membrane assembly | Physics | 0 | Active |
| US9383195B2 | Lithographic apparatus and method | Physics | 0 | Active |
| US11754918B2 | Pellicle and pellicle assembly | Physics | 0 | Active |
| US8570491B2 | System for patterning flexible foils | Physics | 0 | Active |
| US12298663B2 | Method of manufacturing a pellicle for a lithographic apparatus, a pellicle for a lithographic apparatus, a lithographic apparatus, a device manufacturing method, an apparatus for processing a pellicle, and a method for processing a pellicle | Physics | 0 | Active |
| US11231646B2 | Pellicle and pellicle assembly | Physics | 0 | Active |
| US9000303B2 | Method for preparing a patterned electric circuit | Emerging Cross-Sectional Technologies | 0 | Active |
| US11347142B2 | Pellicle and pellicle assembly | Physics | 0 | Active |
| US12066758B2 | Pellicle and pellicle assembly | Physics | 0 | Active |
| US11971654B2 | Metal-silicide-nitridation for stress reduction | Physics | 0 | Active |
| US10983431B2 | Pellicle and pellicle assembly | Physics | 0 | Active |
| US12117726B2 | Pellicle and pellicle assembly | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.