Patent · US Active

Method for producing a TEM sample

US10741360B2 · kind B2 · utility

0Cited by

1References

20Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Josef Biberger · Rottenburg a. d. Laaber, DE
Stefan Lengweiler · Oberkochen, DE

Key dates

Filing date	Apr 12, 2019
Grant date	Aug 11, 2020
Priority date	—
Expiry date	Apr 12, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/31745
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

In a method for producing a TEM sample, an object is fastened to an element of an object holder such that a surface to be processed of the object is arranged substantially perpendicularly to an axis of rotation of the element. An ion beam is directed at the surface to be processed at grazing incidence, wherein the element adopts different rotational positions in relation to the axis of rotation, while the ion beam is directed at the surface to be processed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.