Patent · US Active

MEMS component having two different internal pressures

US10752498B2 · kind B2 · utility

0Cited by

2References

12Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Achim Breitling · Echterdingen, DE
Eckhard Graf · Gomaringen, DE
Jens Frey · Echterdingen, DE
Jochen Reinmuth · Reutlingen, DE
Mawuli Ametowobla · Stuttgart, DE

Key dates

Filing date	Oct 12, 2016
Grant date	Aug 25, 2020
Priority date	—
Expiry date	May 2, 2037

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2203/0145
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method for manufacturing a micromechanical component including a substrate and a cap which is joined to the substrate, and, together with the substrate, encloses a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity. In a first step, an access opening connecting the first cavity to surroundings of the micromechanical component being formed in the substrate or in the cap. In a second step, the first pressure and/or the first chemical composition in the first cavity being set. In a third step, the access opening being sealed by introducing energy or heat into an absorbing portion of the substrate or the cap with the aid of a laser, a reversible getter for further setting the first pressure and/or the first chemical composition being introduced into the first cavity chronologically prior to the third step.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.