Pressure burst free high capacity cryopump

US10760562B2 · kind B2 · utility

Assignee

• Edwards Vacuum LLC · US

Inventors

• Allen J. Bartlett · Milford, US
• Michael A. Driscoll · Canton, US
• Michael J. Eacobacci · South Attleboro, US
• William L. Johnson · Vadnais Heights, US
• Robert P. Sullivan · Chattanooga, US
• Sergei Syssoev · Chelmsford, US
• Mark A. Stira · Wilmington, US
• John J. Casello · Chelmsford, US

Key dates

• Filing date: Jan 15, 2008
• Grant date: Sep 1, 2020
• Expiry date: Nov 27, 2033

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B01D8/00
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid to traverse through the drain hole during regeneration. The cryopump also includes a primary pumping surface supporting adsorbent in thermal contact with the second stage. The second stage array assembly includes a primary condensing surface, protected surfaces having adsorbent, and non-primary condensing surfaces. A baffle is disposed over the drain hole. The baffle redirects gas from an annular space disposed between the radiation shield and the vacuum vessel that attempts to traverse through the drain hole to prevent the gas from condensing on a non-primary condensing surface. The baffle directs gas to condense on the primary condensing surface.