Inventor · Chelmsford, MA, US

Sergei Syssoev

13Patents
4h-index
20Co-inventors
56Inventor score

Filing activity: Jun 15, 2006 → Nov 16, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US8803513B2 Multiple dimension position sensor Physics 64 Active
US8129984B2 Multiple dimension position sensor Physics 40 Active
US7880155B2 Substrate alignment apparatus comprising a controller to measure alignment during transport Physics 12 Active
US10156386B2 System and method for cryogenic cooling Emerging Cross-Sectional Technologies 11 Active
US9266038B2 Cryopump Emerging Cross-Sectional Technologies 4 Active
US9687753B2 Multi-refrigerator high speed cryopump Mechanical Engineering; Lighting; Heating 1 Active
US11209193B2 Pneumatic drive cryocooler Mechanical Engineering; Lighting; Heating 0 Active
US10632399B2 Multi-refrigerator high speed cryopump Mechanical Engineering; Lighting; Heating 0 Active
US9926919B2 Cryopump Emerging Cross-Sectional Technologies 0 Active
US11215384B2 System and method for cryogenic cooling Emerging Cross-Sectional Technologies 0 Active
US10760562B2 Pressure burst free high capacity cryopump Performing Operations; Transporting 0 Active
US11732931B2 Pneumatic drive cryocooler Mechanical Engineering; Lighting; Heating 0 Active
US11287342B2 Capacitance manometer with improved baffle for improved detection accuracy Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.