Methods and systems for inline parts average testing and latent reliability defect detection
US10761128B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 5, 2017 |
| Grant date | Sep 1, 2020 |
| Priority date | — |
| Expiry date | Dec 12, 2037 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods and systems for inline parts average testing and latent reliability defect recognition or detection are disclosed. An inline parts average testing method may include: performing inline inspection and metrology on a plurality of wafers at a plurality of critical steps during wafer fabrication; aggregating inspection results obtained from inline inspection and metrology utilizing one or more processors to obtain a plurality of aggregated inspection results for the plurality of wafers; identifying one or more statistical outliers among the plurality of wafers at least partially based on the plurality of aggregated inspection results obtained for the plurality of wafers; and disqualifying the one or more statistical outliers from entering a supply chain for a downstream manufacturing process, or segregating the one or more statistical outliers for further evaluation, testing or repurposing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.