Ferromagnetic resonance (FMR) electrical testing apparatus for spintronic devices

US10761154B2 · kind B2 · utility

Assignee

• TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. · TW

Inventors

• Guenole Jan · San Jose, US
• Son Le · Gilroy, US
• Luc Thomas · San Jose, US
• Santiago I. Serrano · San Jose, US

Key dates

• Filing date: Jan 19, 2018
• Grant date: Sep 1, 2020
• Expiry date: Jun 10, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R33/60
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A scanning ferromagnetic resonance (FMR) measurement system is disclosed with a radio frequency (RF) probe and one or two magnetic poles mounted on a holder plate and enable a perpendicular-to-plane or in-plane magnetic field, respectively, at test locations. While the RF probe tip contacts a magnetic film on a whole wafer under test (WUT), a plurality of microwave frequencies (fR) is sequentially transmitted through the probe tip. Simultaneously, a magnetic field (HR) is applied to the contacted region thereby causing a FMR condition in the magnetic film for each pair of (HR, fR) values. RF output signals are transmitted through or reflected from the magnetic film to a RF diode and converted to voltage signals which a controller uses to determine effective anisotropy field, linewidth, damping coefficient, and/or inhomogeneous broadening for a sub-mm area. The WUT is moved to preprogrammed locations to enable multiple FMR measurements at each test location.