Cluster tool system with step ladder assembly
US10774588B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 26, 2019 |
| Grant date | Sep 15, 2020 |
| Priority date | — |
| Expiry date | Jul 26, 2039 |
Classification
- Technology area (CPC E)Fixed Constructions
- CPC primaryE06C7/48
- WIPO fieldCivil engineering
- WIPO sectorOther fields
Abstract
A cluster tool system, including: a load lock; a first wafer transfer module; a buffer module; a second wafer transfer module; wherein the load lock, the first wafer transfer module, the buffer module, and the second wafer transfer module are positioned in a linear arrangement; a first process module connected to the first wafer transfer module on a first side of the linear arrangement; a second process module connected to the second wafer transfer module on the first side; a third process module connected to the first wafer transfer module on a second side of the linear arrangement that is opposite the first side; a fourth process module connected to the second wafer transfer module on the second side; a first ladder assembly connected to the buffer module on the first side; a second ladder assembly connected to the buffer module on the second side.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.