Inventor · Salem, OR, US

Damien Slevin

17Patents
4h-index
33Co-inventors
60Inventor score

Filing activity: Mar 15, 2002 → Aug 31, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US8940646B1 Sequential precursor dosing in an ALD multi-station/batch reactor Electricity 519 Active
US10358722B2 Showerhead assembly Electricity 12 Active
US11469084B2 High temperature RF connection with integral thermal choke Electricity 6 Active
US9236244B2 Sequential precursor dosing in an ALD multi-station/batch reactor Electricity 4 Active
US8985152B2 Point of use valve manifold for semiconductor fabrication equipment Emerging Cross-Sectional Technologies 4 Active
US10190216B1 Showerhead tilt mechanism Electricity 3 Active
USD956705S1 Cooling plate for a semiconductor processing apparatus General 3 Active
US8628618B2 Precursor vapor generation and delivery system with filters and filter monitoring system Emerging Cross-Sectional Technologies 3 Active
US6904226B2 Apparatus and method for preparing a coated optical fiber Emerging Cross-Sectional Technologies 2 Expired
US12243725B2 High temperature RF connection with integral thermal choke Electricity 1 Active
US10693433B2 Electrostatic chuck filter box and mounting bracket Electricity 1 Active
US12322641B2 Mechanical indexer for multi-station process module Electricity 0 Active
US10774588B2 Cluster tool system with step ladder assembly Fixed Constructions 0 Active
US10378279B2 Step ladder with component rack system for fabrication facility Fixed Constructions 0 Active
US9637821B2 Method for supplying vaporized precursor Emerging Cross-Sectional Technologies 0 Active
US10760160B2 Showerhead tilt mechanism Electricity 0 Active
US10944374B2 Electrostatic chuck filter box and mounting bracket Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.