Etchant composition and silane compound
US10781371B2 · kind B2 · utility
1Cited by
2References
16Claims
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Key dates
| Filing date | May 24, 2019 |
| Grant date | Sep 22, 2020 |
| Priority date | — |
| Expiry date | May 24, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/32134
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An etchant composition includes phosphoric acid and a silane compound represented by the following Chemical Formula 1: wherein A is an n-valent radical, L is C1-C5 hydrocarbylene, R1 to R3 are independently hydrogen, hydroxy, hydrocarbyl, or alkoxy, in which R1 to R3 exist respectively or are connected to each other by a heteroelement, and n is an integer of 2 to 5.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.