Patent assignee · KR · COMPANY

SK-Materials Co., Ltd.

9Patents
9Active
9Granted
44Portfolio score

Filing activity: Feb 17, 2015 → Sep 2, 2020

Most-cited patents

PatentTitleAreaCited byStatus
US10836962B2 Etchant composition, method of etching insulating film, method of manufacturing semiconductor device, and silane compound Electricity 1 Active
US10781371B2 Etchant composition and silane compound Electricity 1 Active
US11186772B2 Etching composition, method for etching insulating film of semiconductor devices using the same and method for preparing semiconductor devices Electricity 0 Active
US11028321B2 Etching composition, method for etching insulating layer of semiconductor devices and method for preparing semiconductor devices Chemistry; Metallurgy 0 Active
US10934167B2 Preparation method of trifluoroamine oxide Performing Operations; Transporting 0 Active
US11066601B2 Composition for etching, method for etching insulator and method for manufacturing semiconductor device, and novel compounds Electricity 0 Active
US11236116B2 Silicon compound Chemistry; Metallurgy 0 Active
US10941341B2 Etching composition additive, method for preparing the same and etching composition comprising the same Electricity 0 Active
US9586820B2 Apparatus for preparing germane gas and method for preparing monogermane gas using same Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.