Systems and methods for charged particle flooding to enhance voltage contrast defect signal
US10784077B2 · kind B2 · utility
5Cited by
11References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 2, 2018 |
| Grant date | Sep 22, 2020 |
| Priority date | — |
| Expiry date | Aug 2, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2817
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Systems and methods for implementing charged particle flooding in a charged particle beam apparatus are disclosed. According to certain embodiments, a charged particle beam system includes a charged particle source and a controller which controls the charged particle beam system to emit a charged particle beam in a first mode where the beam is defocused and a second mode where the beam is focused on a surface of a sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.