Zhongwei Chen
112Patents
12h-index
68Co-inventors
89Inventor score
Filing activity: Nov 21, 2002 → Aug 5, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6815345B2 | Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing | Electricity | 91 | Expired |
| US9607805B2 | Apparatus of plural charged-particle beams | Electricity | 43 | Active |
| US9922799B2 | Apparatus of plural charged-particle beams | Electricity | 40 | Active |
| US8294095B2 | Apparatus of plural charged particle beams with multi-axis magnetic lens | Electricity | 37 | Active |
| US10141160B2 | Apparatus of plural charged-particle beams | Electricity | 31 | Active |
| US10062541B2 | Apparatus of plural charged-particle beams | Electricity | 26 | Active |
| US10643820B2 | Apparatus of plural charged-particle beams | Electricity | 23 | Active |
| US10879031B2 | Apparatus of plural charged-particle beams | Electricity | 23 | Active |
| US7960697B2 | Electron beam apparatus | Electricity | 19 | Active |
| US9691588B2 | Apparatus of plural charged-particle beams | Electricity | 19 | Active |
| US9000395B2 | Energy filter for charged particle beam apparatus | Electricity | 14 | Active |
| US8436317B1 | Wien filter | Electricity | 13 | Active |
| US10236156B2 | Apparatus of plural charged-particle beams | Electricity | 12 | Active |
| US10395886B2 | Apparatus of plural charged-particle beams | Electricity | 11 | Active |
| US7825386B2 | System and method for a charged particle beam | Electricity | 10 | Active |
| US8445862B2 | Apparatus of plural charged particle beams with multi-axis magnetic lens | Electricity | 10 | Active |
| US9691586B2 | Apparatus of plural charged-particle beams | Electricity | 10 | Active |
| US8003953B2 | Multi-axis magnetic lens | Electricity | 9 | Active |
| US8274046B1 | Monochromator for charged particle beam apparatus | Electricity | 7 | Active |
| US7919760B2 | Operation stage for wafer edge inspection and review | Electricity | 6 | Active |
| US9330987B2 | Hot spot identification, inspection, and review | Electricity | 6 | Active |
| US8164060B2 | System and method for a charged particle beam | Electricity | 6 | Active |
| US9105440B2 | Apparatus of plural charged particle beams with multi-axis magnetic lens | Electricity | 5 | Active |
| US10784077B2 | Systems and methods for charged particle flooding to enhance voltage contrast defect signal | Electricity | 5 | Active |
| US8094924B2 | E-beam defect review system | Electricity | 5 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.