Patent · US Active

Semiconductor devices having crack-inhibiting structures

US10784212B2 · kind B2 · utility

3Cited by
1References
22Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 28, 2018
Grant dateSep 22, 2020
Priority date
Expiry dateDec 28, 2038

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY02P80/30
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Semiconductor devices having metallization structures including crack-inhibiting structures, and associated systems and methods, are disclosed herein. In one embodiment, a semiconductor device includes a metallization structure formed over a semiconductor substrate. The metallization structure can include a bond pad electrically coupled to the semiconductor substrate via one or more layers of conductive material, and an insulating material—such as a low-κ dielectric material—at least partially around the conductive material. The metallization structure can further include a crack-inhibiting structure positioned beneath the bond pad between the bond pad and the semiconductor substrate. The crack-inhibiting structure can include a barrier member extending vertically from the bond pad toward the semiconductor substrate and configured to inhibit crack propagation through the insulating material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.